YES-EcoCoat Vapor Phase Deposition System YES-1224P

Product Information

"Yield Engineering Systems (YES) paired the latest advances in deposition technology with established plasma cleaning technology to create the YES-EcoCoat Vapor Phase Deposition System. Whether you need a hydrophobic or hydrophilic surface for your application, the YES-EcoCoat is especially suited for achieving uniform results. Growing Need for Process Control As technology shrinks, the need for precise control over nanoscale surface areas increases. The YES-EcoCoat is designed to accommodate a variety of functionally diverse silanes, for a variety of surfaces. And, the plasma function allows surface preparation as well as in-situ chamber cleaning to assure run-to-run repeatability. The YES-EcoCoat gives process engineers control over: Amount of liquid Speed of liquid injection Vaporization chamber temperature Vapor line temperature Process vacuum chamber temperature Process starting pressure Exposure time Surface preparation. Unit is SOLD AS/IS. It does not vacuum down and has an error message. The system is designed for clean room compatibility and made with 316L stainless steel. It has several innovative hardware features such as chamber dimensions of 40.6 cm (W) x 46 cm (D) x 40.6 cm (H) and 4 removable internal stainless steel shelves; 16 available configurations ensuring flexibility in operation. . The performance of the system can be measured through RF Plasma Frequency of 40 kHz, RF Plasma Power: 100-1000 watts, Operation Temperature: Ambient to 205 C, and Uniformity: 5 C during dwell after stabilization period. It also has a safety feature of audible and visual alarms; redundant over-temp monitoring. The harmonized code is 84862000.

• Multiple Chamber Configurations
• Plasma Function for Surface Preparation
• Uniform Vapor Phase Deposition

• Chamber Material: 316L stainless steel
• Chamber Size: 40.6 cm (W) x 46 cm (D) x 40.6 cm (H) (16"x 18" x 16")
• Overall System Dimensions: 103.5 cm (W) x 111.1 cm (D) x 114.46 cm (H) (40.75" x 42.75" x 45.06")
• Light tower increases height by 30 cm (11.81")
• Loading: 4 removable internal stainless steel shelves; 16 available configurations
• 6-in. Cold Trap Capacities LN2: 1.6 liters; condensate: 1.6 liters
• RF Plasma Frequency: 40 kHz
• RF Plasma Power: 100-1000 watts
• Operation Temperature: Ambient to 205 C

Metric: 566.99 kg
Imperial: 1250 lbs

Metric: 103.5 cm x 111.1 cm x 114.46 cm
Imperial: 40.75 in x 42.75 in x 45.06 in

84862000

The chosen harmonized code 84862000 refers to machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits.