Nordson March AP-300 Vacuum Batch Plasma Treatment System

Product Information

Welcome to the world of Nordson March AP-300 Vacuum Batch Plasma Treatment System! This used system has undergone rigorous testing and is in very good working condition, complete with a 30-day warranty. This exceptionally uniform plasma cleaning and treatment system finds practical utility in semiconductor, microelectronic packaging and assembly, and medical device manufacturing. The system's state-of-the-art features include a PLC controller with a touch screen - offering an intuitive graphical interface and real-time process representation, flexible shelf architecture that allows processing of a wide variety of part carriers, automatic impedance matching 13.56 MHz RF generator, statistics process control system that generates process and production data, and the system is completely self-contained requiring minimal floor space. The PP-300 also supports a wide range of process gases including argon, oxygen, helium, and fluorinated gases. Quality features such as durable high-quality aluminum construction and fixtures ensure high performance, optimal gas control, and real-time process monitoring. This sturdy and high-performing system is packed with features to take your research to the next level!

• PLC controller with touch screen interface
• Automatic impedance matching 13.56 MHz RF generator
• Statistical process control system
• Durable high-quality aluminum construction and fixtures
• Compact, self-contained system requiring minimal floor space

• Enclosure Dimensions: 569W x 869D x 704H mm (22W x 34D x 28H in.)
• Net Weight: 221 kg (487 lbs.)
• Maximum Volume: 33.1 liters (2023 in)
• Standard Wattage: 300 W
• Frequency: 13.56 MHz
• Purge Gas Pressure: 2 bar (30 psig) min. to 6.9 bar (100 psig) max., regulated
• Gas Generators: Nitrogen, Hydrogen (Requires Additional Non-Optional Hardware)
• Compliance: SEMI S2/S8 (EH&S/Ergonomics), International CE Marked
• Gas Control: Available Flow Volumes 10, 25, 50, 100, 250 or 500 sccm, Maximum Number of MFCs 4
• Power Supply: 110-240 VAC, 50-60 Hz, 1-phase, 10 A

Metric: 221 kg
Imperial: 487 lbs

Metric: 869 cm x 569 cm x 704 cm
Imperial: 34 in x 22 in x 28 in

902780

902780 - Other instruments and apparatus using optical radiations (UV, visible, IR)