Coherent/Micronanics Compex Pro 110 F Laser System for Microfabrication
Coherent/Micronanics
Details
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CategoryLaser
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Dimension78.0in x 75.0in x 87.0in
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SerialGEP.1113838.10068
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Shipping TypeFreight
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ManufacturingDoes Not Apply
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Voltage / Hertz230V / 50Hz/60Hz
Description
The Coherent/Micronanics Compex Pro 110 F Laser MicroNano System represents a high-performance solution for precision microfabrication and material processing. Manufactured in Germany, this excimer UV laser system is designed to handle demanding research, prototyping, and production environments with exceptional stability and energy uniformity. Featuring a compact and robust design with advanced safety mechanisms including interlock systems and laser-safe viewing windows, this system safely operates under Class 1 compliance standards. Equipped with precision X, Y, and Z stages, integrated diagnostics, and Coherent EnergyMax software, it ensures maximum efficiency and minimal downtime. While the system powers on and passes basic tests, it requires further functional testing and user credentials. Despite minor cosmetic wear and some display damage, the equipment remains largely intact and well-maintained. Ideal for semiconductor lithography, materials processing, and laser-based scientific research.
Technician comment
This Micronanics MicroNano System with the Coherent COMPex Pro 110 F excimer laser, was sourced from an operational environment and has been maintained in excellent cosmetic condition. Only minimal signs of prior use are present, (Acer display has minor damage (cracked screen on top right & bottom left corner) but doesn't affect functionality. The Micronanics enclosure powers on successfully, but complete functional testing is pending user login credentials for full access to system functions. Coherent EnergyMax software for laser operations and Micronanics MNA Drilling Tool software for advanced microfabrication applications installed. Overall, this unit is preowned but shows light wear from previous use.
Key Features
- High-performance excimer UV laser
- Variable output at wavelengths: 193 nm, 248 nm, 308 nm, 351 nm
- Precision X, Y, Z stages with user-friendly interface
- Integrated diagnostics and EnergyMax software
- Compact design for Class 1 laser safety compliance, heavy-duty metal construction
Specifications
- Excimer (Gas) Laser, Pulsed UV
- Wavelength: 248 nm (KrF gas)
- Pulse Energy: Up to 400 mJ
- Repetition Rate: 0–100 Hz
- Pulse Width: 25 ns
- Beam Profile: Flat top with variable spot size
- Beam Divergence: 3 x 1 mrad
- Peak Power: Up to 110 watts
- Manufactured in 2013
- Power: 3 kVA, Voltage: 230 V-, Frequency: 50-60 Hz
- Water cooling required for operation
Weight
Imperial: 2400.0 Pounds
Metric: 1088.62 Kilograms
Shipping Dimensions
Imperial: 93.6 lb x 90.0 lb x 104.4 lb
Metric: 237.74 cm x 228.6 cm x 265.18 cm
Harmonized Code
90132000
Harmonized Code Details
90132000 - Lasers, other than laser diodes; This classification is suitable as it pertains to industrial laser equipment used for materials processing, such as the Coherent/Micronanics Compex Pro 110 F.
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