Glow AutoGlow Plasma Cleaner Quartz Chamber System 10-300W 13.56MHz RF
Glow Research
Details
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CategoryMiscellaneous
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Dimension28.0in x 17.0in x 27.0in
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SerialGRL40845
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Shipping TypeFedEx Ground
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ManufacturingDoes Not Apply
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Voltage / Hertz120V/220V / 50Hz/60Hz
Description
The Glow Research AutoGlow Plasma Cleaning System, model AutoGlow, is a high-performance tabletop plasma chemistry reactor, designed for R&D and production applications. This system is equipped with a quartz chamber and operates on a 13.56 MHz solid-state generator with adjustable power from 10 to 300 watts in one-watt increments. Ideal for plasma cleaning, surface modification, photoresist stripping, and organic removal due to its efficient gas breakdown capabilities and automatic tuning features. Although the unit has cosmetic wear from previous use and cannot be fully tested, it powers on and successfully passes basic tests. This plasma cleaner system is suitable for applications in both laboratory and production environments, including PDMS bonding and FA analysis. Includes a voltage frequency range of 120V/220V and a hertz range of 50Hz/60Hz, with pressure readouts and solid-state electronics.
Key Features
- 10-300 watts solid-state generator
- Plasma cleaning and surface modification
- Quartz chamber system
- Automatic tuning and pressure readout
- Adjustable power increments
- 13.56 MHz RF generator
Specifications
- Power Range: 10 to 300 watts
- Frequency: 13.56 MHz
- Voltage: 120V/220V
- Hertz: 50Hz/60Hz
- Included: Power cord
- Adjustable gas flow control
Weight
Imperial: 124.8 Pounds
Metric: 56.61 Kilograms
Shipping Dimensions
Imperial: 33.6 lb x 20.4 lb x 32.4 lb
Metric: 85.34 cm x 51.82 cm x 82.3 cm
Harmonized Code
847989
Harmonized Code Details
This code is used for machines and mechanical appliances with individual functions, not specified or included elsewhere. The AutoGlow plasma system qualifies under this category as it serves a unique function in plasma cleaning and surface modification.
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