Glow Research AutoGlow Plasma Cleaning System with Quartz Chamber GRL40845

Product Information

The Glow Research AutoGlow Plasma Cleaning System with Quartz Chamber is a tabletop plasma chemistry reactor designed for R&D and production. The variable 10 watt to 300 watt, 13.56 MHz solid state generator allows for efficient breakdown of gases to create reactive species for plasma cleaning, surface modification, and photo resist removal. The system is updated with current technology including a proprietary phase magnitude detector and industrial RF network. It is used in semiconductor production, PDMS bonding, organic removal, and other applications.

• Variable 10 to 300 watts, 13.56 MHz solid state generator
• Automatic tuning with pressure readout
• Efficient breakdown of gases for plasma cleaning and modification

• Wattage: 10 to 300 watts
• Frequency: 13.56 MHz
• Chamber: Quartz
• Tuning: Automatic with pressure readout
• Applications: Plasma cleaning, surface modification, photo resist removal
• Technology: Solid state generator with phase magnitude detector and RF network

Metric: 56.7 kg
Imperial: 124.8 lb

Metric: 85.09 cm x 43.18 cm x 82.55 cm
Imperial: 33.5 in x 17 in x 32.5 in

841989

The harmonized code 841989 is for machinery, plant or laboratory equipment for the treatment of materials by a process involving a change of temperature, specifically for laboratory equipment. This code fits the Glow Research AutoGlow Plasma Cleaning System based on its function and design.