YES YES-EcoCoat US 1224P Silane Vapor Deposition System, Includes Computer
YES
Details
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CategoryMolecular Biology
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Dimension57.0in x 72.0in x 62.0in
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Serial90222
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Shipping TypeFreight
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ManufacturingDoes Not Apply
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Voltage / Hertz208V / 50Hz/60Hz
Description
The YES-EcoCoat US 1224P by Yield Engineering Systems is a Silane Monolayer Vapor Phase Deposition System engineered for process development and volume production. With a configurable large capacity chamber and in-situ plasma, the system maintains excellent silane monolayer deposition uniformity for wafers, glass slides, and thermoplastic surfaces. Ideal for applications like anti-stiction films for NIL, MEMS, AR/VR, and covalent bonding of biomolecules, it supports up to three independent vapor delivery lines with precise control over various process parameters. Features include a temperature range up to 205°C, chamber pressure control from 100 mT - 100 T, and 40 kHz plasma frequency. This comprehensive system comes with a new HP ProDesk PC, YES Data Acquisition Software, and various peripherals, making it an optimal choice for both research and high-volume production.
Technician comment
This Ecocoat unit is brand new and the custom system includes the following brand new peripherals: - YES Rolling System Cart for EcoCoat, 47w x 47d x 26h - HP ProDesk PC with Intel I5, and HP z24f G3 Monitor -YES Data Acquisition Software - Pump (iXH100/Edwards ES602 Silencer) Item No. A5058800 - SMC Thermo Chiller HRS012-AN-20 - MV Vapor Multi-Trap Chiller Model 355040S - YES/XP Power VLF-1000 - MFC 100SCCM 02 - Miller Electric Coolmate 3 Cooler, Sku 043008 - Bottle Glass Septum Pierce 40ML x 12 - Quick Kit 50ML 1/8 Omni - Additional accessories (see photos)
Key Features
- Manual load with large capacity chamber
- Supports surface modification applications
- Three independent vapor delivery lines
- In-situ gas plasma for flexibility
- Includes computer and software
- Temperature up to 205°C
- Chamber pressure control 100 mT - 100 T
- 40 kHz plasma frequency
Specifications
- Chamber Size: 40.6 cm (W) x 46 cm (D) x 40.6 cm (H)
- Operation Temperature: Ambient to 205°C
- Temperature Uniformity: ±1.5%
- Chamber Material: 316L stainless steel
- RF Plasma Frequency / Power: 40 kHz, 100-1000 Watts
- Chemical Usage: 0.1 – 3.0 mL
- Vapor Delivery Lines: Three, independent control
- Wafer Capacity: Up to 8 cassettes (100 mm - 300 mm wafers)
- Weight: 1100 lb (499 kg)
- Dimensions: 116 cm x 98.4 cm x 112.73 cm
Weight
Imperial: 1320.0 Pounds
Metric: 598.74 Kilograms
Shipping Dimensions
Imperial: 68.4 lb x 86.4 lb x 74.4 lb
Metric: 173.74 cm x 219.46 cm x 188.98 cm
Harmonized Code
841989
Harmonized Code Details
841989 - Machinery, plant or laboratory vaporizing/spraying machinery. This code is applicable due to the vapor phase deposition technology used in the equipment.
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