YES YES-EcoCoat 1224P Coater Deposition System New Includes Computer
YES
Details
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CategoryProduction / Manufacturing
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Dimension57.0in x 72.0in x 62.0in
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Serial90222
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Shipping TypeFreight
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ManufacturingDoes Not Apply
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Voltage / Hertz208V / 50Hz/60Hz
Description
The Yield Engineering Systems YES-EcoCoat US 1224P is a silane monolayer vapor phase deposition system tailored for modern laboratory needs. It features an adjustable, large-capacity chamber, suitable for process development and production. With operational temperatures ranging from ambient up to 205°C and excellent thermal uniformity, the system ensures consistent silane deposition on various substrates such as wafers, glass, and thermoplastics. Equipped with three independent vapor delivery lines and in-situ plasma, this system adapts to numerous applications, including surface modification, anti-stiction films, and biomolecule bonding. Its plasma cleaning capability ensures that surfaces are hydrophobicity-controlled, preparing substrates for optimal silane coating. Included new peripherals enhance the system's functionality, making it ready for both research and industrial-scale applications.
Technician comment
This Ecocoat unit is brand new and the custom system includes the following brand new peripherals: - YES Rolling System Cart for EcoCoat, 47w x 47d x 26h - HP ProDesk PC with Intel I5, and HP z24f G3 Monitor -YES Data Acquisition Software - Pump (iXH100/Edwards ES602 Silencer) Item No. A5058800 - SMC Thermo Chiller HRS012-AN-20 - MV Vapor Multi-Trap Chiller Model 355040S - YES/XP Power VLF-1000 - MFC 100SCCM 02 - Miller Electric Coolmate 3 Cooler, Sku 043008 - Bottle Glass Septum Pierce 40ML x 12 - Quick Kit 50ML 1/8 Omni - Additional accessories (see photos)
Key Features
- Silane monolayer vapor phase deposition
- In-situ plasma cleaning
- Ambient to 205°C operation temperature
- Three independent vapor delivery lines
- Configurable large capacity chamber
- Suitable for process development and volume production
- Includes computer with data software
Specifications
- RF Plasma Frequency / Power: 40 kHz, 100-1000 Watts
- Operational Temperature: Ambient to 205°C
- Temperature Uniformity: ± 1.5% after stabilization
- Chamber Pressure Control: 100 mT - 100 T
- Chemical Usage: 0.1 – 3.0 mL (typical process)
- Chemical Dispense Volume: Increments of 0.1 mL
- Vapor Delivery Lines: Three, with independent process and thermal control
- Chamber Material: 316L stainless steel
- Chamber Size: 40.6 cm (W) x 46 cm (D) x 40.6 cm (H)
Weight
Imperial: 1320.0 Pounds
Metric: 598.74 Kilograms
Shipping Dimensions
Imperial: 68.4 lb x 86.4 lb x 74.4 lb
Metric: 173.74 cm x 219.46 cm x 188.98 cm
Harmonized Code
8421.99.00
Harmonized Code Details
8421.99.00 - Parts of machinery and apparatus for filtering or purifying gases. This code applies as the equipment functions as a deposition system and includes components that handle gas delivery and filtration.
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