YES YES-EcoCoat US 1224P Deposition System Silane Vapor Phase With Computer
YES
Details
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CategoryProduction / Manufacturing
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Dimension57.0in x 72.0in x 62.0in
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Serial90173
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Shipping TypeFreight
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ManufacturingDoes Not Apply
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Voltage / Hertz208V / 50Hz/60Hz
Description
The Yield Engineering Systems YES-EcoCoat US 1224P is an advanced silane monolayer vapor phase deposition system, designed to support a broad range of applications in scientific and industrial settings. With a configurable large capacity chamber, this system is ideal for process development and high-volume production. It features three independent vapor delivery lines and excellent thermal uniformity, ensuring precise silane monolayer deposition on wafers, glass slides, or thermoplastic surfaces. The in-situ plasma cleaning and control over various parameters such as liquid amount, vaporization chamber temperature, and process vacuum chamber temperature, make it a versatile solution for surface modification, anti-stiction films, and covalent bonding of biomolecules. The system's chamber is made of 316L stainless steel, offering a dimension of 40.6 cm x 46 cm x 40.6 cm. It supports coating temperatures up to 200°C and maintains a temperature uniformity of ±1.5% after stabilization, making it highly reliable and efficient for consistent and repeatable processes.
Technician comment
This Ecocoat unit is brand new and the custom system includes the following brand new peripherals: - YES Rolling System Cart for EcoCoat, 47w x 47d x 26h - Dell ProDesk PC with Intel I5, and HP z24f G3 Monitor -YES Data Acquisition Software - Pump (XH100/Edwards ES602 Silencer) Item No. A5058800 - SMC Thermo Chiller HRS012-AN-20 - MV Vapor Multi-Trap Chiller Model 355040S - YES/XP Power VLF-1000 - MFC 100SCCM 02 - Miller Electric Coolmate 3 Cooler, Sku 043008 - Bottle Glass Septum Pierce 40ML x 12 - Quick Kit 50ML 1/8 Omni - Additional accessories (see photos)
Key Features
- Advanced silane monolayer vapor phase deposition
- Configurable large capacity chamber
- Three independent vapor delivery lines
- In-situ plasma cleaning
- Temperature uniformity ±1.5%
- Coating temperatures up to 200°C
- Chamber made of 316L stainless steel
Specifications
- RF Plasma Frequency / Power: 40 kHz, 100-1000 Watts
- Operation Temperature: Ambient to 205°C
- Temperature Uniformity: ±1.5% after stabilization
- Chamber Pressure Control: 100 mT - 100 T
- Chemical Usage: 0.1 – 3.0 mL (typical process)
- Chemical Dispense Volume: Increments of 0.1 mL
- Number of Chemicals: Up to three
- Vent Gas Consumption: 10 SCF run average
- Chamber Size: 40.6 cm (W) x 46 cm (D) x 40.6 cm (H) (16”x 18”x 16”)
- Overall System Dimensions: 116 cm (W) x 98.4 cm (D) x 112.73 cm (H) (46” x 38.75” x 44.38”)
- Vapor Delivery Lines: Three, with independent process and thermal control
Weight
Imperial: 1320.0 Pounds
Metric: 598.74 Kilograms
Shipping Dimensions
Imperial: 68.4 lb x 86.4 lb x 74.4 lb
Metric: 173.74 cm x 219.46 cm x 188.98 cm
Harmonized Code
8419.89.95
Harmonized Code Details
8419.89.95 - Machinery for chemical vapor deposition (CVD) processes. Selected due to the system's specific application in CVD processes for industrial manufacturing.
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