YES EcoCoat US 1224P Silane Vapor Deposition System w/ Software, 200C
YES
Details
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CategoryProduction / Manufacturing
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Dimension57.0in x 72.0in x 62.0in
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Serial90241
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Shipping TypeFreight
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ManufacturingDoes Not Apply
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Voltage / Hertz208V / 50Hz/60Hz
Description
Yield Engineering Systems (YES) introduces the brand new YES-EcoCoat US 1224P Silane Monolayer Vapor Phase Deposition System with In-situ Plasma. This advanced system is designed with a large configurable chamber and supports precise surface modification, catering to both process development and high-volume production. It boasts three independent vapor delivery lines, excellent thermal uniformity, and features in-situ gas plasma to ensure consistency in silane monolayer deposition on substrates like wafers, glass slides, or thermoplastic surfaces. Key applications include promoting/preventing adhesion, creating anti-stiction films for NIL/MEMS/AR/VR, covalent biomolecular bonding to various substrates, and plasma cleaning to modify surface hydrophobicity. The EcoCoat system's flexibility is further enhanced by features like RF Plasma Frequency of 40 kHz with adjustable power settings and temperature uniformity within ± 1.5%. This system includes peripherals such as a rolling system cart, a HP ProDesk PC, thermo chiller, multi-trap chiller, and additional accessories for seamless integration into any lab environment.
Technician comment
This Ecocoat unit is brand new and the custom system includes the following brand new peripherals: - YES Rolling System Cart for EcoCoat, 47w x 47d x 26h - HP ProDesk PC with Intel I5, HP 24mv G4 Monitor -YES Data Acquisition Software - Pump (XH100/Edwards ES602 Silencer) Item No. A5058800 - SMC Thermo Chiller HRS012-AN-20 - MV Vapor Multi-Trap Chiller Model 355040S - YES/XP Power VLF-1000 - MFC 100SCCM 02 - Miller Electric Coolmate 3 Cooler, Sku 043008 - Bottle Glass Septum Pierce 40ML x 12 - Quick Kit 50ML 1/8 Omni - Additional accessories (see photos)
Key Features
- Silane Monolayer Vapor Phase Deposition
- In-situ Plasma Enhancement
- Large Capacity Chamber
- Excellent Thermal Uniformity
- Independent Vapor Delivery Lines
- RF Plasma Frequency 40 kHz
- Operation Temperature Up to 205°C
- Silicon, Glass, and Thermoplastic Compatibilities
- Includes PC, Software, and Accessories
Specifications
- Operation Temperature: Ambient to 205°C
- Temperature Uniformity: ± 1.5%
- RF Plasma Frequency: 40 kHz
- Chamber Pressure Control: 100 mT - 100 T
- Chemical Usage: 0.1 – 3.0 mL
- Chamber Material: 316L Stainless Steel
- Wafer Capacity: Up to 300 mm
- Chamber Dimensions: 40.6 cm (W) x 46 cm (D) x 40.6 cm (H)
- 12 Removable Stainless Steel Shelves
- Compatible with Organosilanes, PEG, Biotin
- Eco-friendly Process with Reduced Chemical Use
Weight
Imperial: 1320.0 Pounds
Metric: 598.74 Kilograms
Shipping Dimensions
Imperial: 68.4 lb x 86.4 lb x 74.4 lb
Metric: 173.74 cm x 219.46 cm x 188.98 cm
Harmonized Code
847989
Harmonized Code Details
847989: Machines and mechanical appliances having individual functions, not specified elsewhere; reflecting the specialized function of silane deposition which is not covered under another category.
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