YES YES-EcoCoat US 1224P Silane Deposition System with Plasma
YES
Details
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CategoryMolecular Biology
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Dimension57.0in x 72.0in x 62.0in
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Serial90241
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Shipping TypeFreight
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ManufacturingDoes Not Apply
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Voltage / Hertz208V / 50Hz/60Hz
Description
The Yield Engineering Systems YES-EcoCoat US 1224P Silane Monolayer Vapor Phase Deposition System is a sophisticated surface modification tool designed for precise volume production and process development. Featuring a large capacity chamber and manual load capability, this system supports applications requiring high uniformity in silane monolayer deposition for substrates such as wafers, glass slides, and thermoplastics. It incorporates advanced in-situ plasma and three independent vapor delivery lines for flexibility, maintaining excellent thermal uniformity and plasma cleaning capabilities. The 40 kHz plasma frequency and 100 W to 1000 W power ensure effective surface preparation and control. With an operational temperature range from ambient to 205°C and pressure control from 100 mTorr to 100 Torr, the EcoCoat is ideal for genomic sequencing flow cell manufacturing and biomolecular bonding processes. The unit, housed in 316L stainless steel, includes new peripherals such as an HP ProDesk PC, data acquisition software, a rolling system cart, and other accessories, ensuring a cost-effective transition to high-volume production.
Technician comment
This Ecocoat unit is brand new and the custom system includes the following brand new peripherals: - YES Rolling System Cart for EcoCoat, 47w x 47d x 26h - HP ProDesk PC with Intel I5, HP 24mv G4 Monitor -YES Data Acquisition Software - Pump (XH100/Edwards ES602 Silencer) Item No. A5058800 - SMC Thermo Chiller HRS012-AN-20 - MV Vapor Multi-Trap Chiller Model 355040S - YES/XP Power VLF-1000 - MFC 100SCCM 02 - Miller Electric Coolmate 3 Cooler, Sku 043008 - Bottle Glass Septum Pierce 40ML x 12 - Quick Kit 50ML 1/8 Omni - Additional accessories (see photos)
Key Features
- Configurable high-capacity chamber
- In-situ plasma with RF frequency 40 kHz
- Temperature uniformity of ±1.5% after stabilization
- Operational temperature ambient to 205°C
- Chamber pressure control from 100 mT to 100 T
- Three independent vapor delivery lines
- HEPA filtration system
- Supports multiple plasma operating modes
- Accommodates various wafer and slide capacities
- 316L stainless steel chamber material
Specifications
- RF Plasma Frequency / Power: 40 kHz, 100-1000 Watts
- Operational Temperature: Ambient to 205°C
- Temperature Uniformity: ± 1.5% after stabilization
- Chamber Pressure Control: 100 mT - 100 T
- Chemical Usage: 0.1 – 3.0 mL (typical process)
- Number of Chemicals: Up to three
- Chamber Material: 316L stainless steel
- Chamber Size: 40.6 cm (W) x 46 cm (D) x 40.6 cm (H)
- Overall System Dimensions: 116 cm (W) x 98.4 cm (D) x 112.73 cm (H)
- Wafer Capacity: Up to 8 cassettes (100 mm - 150 mm), 2 cassettes (200 mm), 1 cassette (300 mm)
- Slide Capacity: Up to 2,000 with custom racks
Weight
Imperial: 1320.0 Pounds
Metric: 598.74 Kilograms
Shipping Dimensions
Imperial: 68.4 lb x 86.4 lb x 74.4 lb
Metric: 173.74 cm x 219.46 cm x 188.98 cm
Harmonized Code
8424.89.7090
Harmonized Code Details
Harmonized code 8424.89.7090 includes machinery and apparatus for the projection, dispersal, or spraying of liquids or powders, used for surface treatment processes in industrial settings. This code is suited for the YES-EcoCoat due to its role in silane deposition and surface modification.
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